{"schema":"rootz.ai/sec-company/v1","layer":1,"cik":"0001113232","name":"AXCELIS TECHNOLOGIES INC","summary":"Axcelis Technologies designs, manufactures, and services ion implantation and other semiconductor processing equipment used in fabricating semiconductor chips. Its Purion family of ion implanters covers high current, high energy, and medium current applications. The company also offers the Ovation batch implanter family and extensive aftermarket services including spare parts, upgrades, maintenance, and training. Ion implantation represented 98.2% of 2025 revenue of $839.0 million, serving leading semiconductor chip manufacturers worldwide.","people":[],"products":[{"name":"Purion H","type":"hardware","description":"High current spot beam ion implanter covering traditional and emerging device fabrication requirements."},{"name":"Purion Dragon","type":"hardware","description":"High current ion implanter for traditional and advanced semiconductor applications."},{"name":"Purion H200","type":"hardware","description":"High current ion implanter supporting advanced device fabrication requirements."},{"name":"Purion XE","type":"hardware","description":"High energy ion implanter with RF Linac technology for specialty and power device applications."},{"name":"Purion EXE","type":"hardware","description":"High energy ion implanter for high volume power device aluminum implant applications."},{"name":"Purion Power Series","type":"hardware","description":"Family of high current, medium current, and high energy implanters optimized for SiC wafer power device applications."},{"name":"Ovation (GSD/E2)","type":"hardware","description":"Multi-wafer batch ion implanter platform extending Axcelis GSD platform with updated components for long-term sustainability."},{"name":"Digital Tool Box","type":"service","description":"Innovative aftermarket service offering with online training, remote diagnosis and install, and automated troubleshooting guides."},{"name":"CS&I Aftermarket Business","type":"service","description":"Lifecycle aftermarket products and services including used tools, spare parts, upgrades, maintenance, and customer training."}],"partnerships":[],"affiliations":[],"origin":{"leaf":"a374acfdc721de8b6ba4e774e965043f89954e116e1ea2aa354f8ff93cf3bb60","formula":"v2: sha256( sha256(content) || parent || source_accession )","content_sha256":"e10de9012dc6371b45d7addc210cb48b383e09514eb3932af8a520df15fefe41","parent":"533f82468e9757d53e20a23c2d8407ce732f446c95247787550e61fa087e7651","source":"0001104659-26-020461","chain":"sec.gov/EDGAR (retrieved over TLS, accession recorded) > origin.rootz.global extraction > this response","registry":"origin.rootz.global","verify":"Recompute it: sha256(sha256(<this response body minus the origin block>) || parent || source_accession). 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