EX-21.1 2 entg-12312025xex211.htm EX-21.1 Document Exhibit 21.1 Subsidiaries of Entegris, Inc. Name of Subsidiary Jurisdiction ATMI International Trading Co. Ltd. China CMC Materials B.V. The Netherlands CMC Materials Global Corp. Delaware CMC Materials LLC Delaware CMC Materials Shanghai Co., Ltd. China CMC Materials Taiwan Co., Ltd. Taiwan Entegris Canada Limited Canada Digital Specialty Chemicals UK Limited United Kingdom Entegris Asia Pte. Ltd. Singapore Entegris Ecosys LLC Delaware Entegris...
Q2 FY2026 — expected 2026-07-17
| Filed | Period | Accession | Source | Full Text |
|---|---|---|---|---|
| 2026-02-11 | 2025-12-31 | 0001101302-26-000012 | EDGAR | 58K words |
| 2025-02-12 | 2024-12-31 | 0001101302-25-000015 | EDGAR | — |
| 2024-02-15 | 2023-12-31 | 0001101302-24-000009 | EDGAR | — |
| 2023-02-23 | 2022-12-31 | 0001101302-23-000021 | EDGAR | — |
| 2022-02-04 | 2021-12-31 | 0001101302-22-000010 | EDGAR | — |
| 2021-02-05 | 2020-12-31 | 0001101302-21-000011 | EDGAR | — |
| 2020-02-07 | 2019-12-31 | 0001101302-20-000013 | EDGAR | — |
| 2019-02-11 | 2018-12-31 | 0001101302-19-000010 | EDGAR | — |
| 2018-02-15 | 2017-12-31 | 0001101302-18-000008 | EDGAR | — |
| 2017-02-17 | 2016-12-31 | 0001101302-17-000005 | EDGAR | — |
| Filed | Period | Accession | Source | Full Text |
|---|---|---|---|---|
| 2025-10-30 | 2025-09-27 | 0001101302-25-000103 | EDGAR | 21K words |
| 2025-07-30 | 2025-06-28 | 0001101302-25-000079 | EDGAR | — |
| 2025-05-07 | 2025-03-29 | 0001101302-25-000060 | EDGAR | — |
| 2024-11-04 | 2024-09-28 | 0001101302-24-000074 | EDGAR | — |
| 2024-07-31 | 2024-06-29 | 0001101302-24-000053 | EDGAR | — |
| 2024-05-01 | 2024-03-30 | 0001101302-24-000040 | EDGAR | — |
| 2023-11-02 | 2023-09-30 | 0001101302-23-000089 | EDGAR | — |
| 2023-08-03 | 2023-07-01 | 0001101302-23-000082 | EDGAR | — |
| 2023-05-11 | 2023-04-01 | 0001101302-23-000069 | EDGAR | — |
| 2022-11-02 | 2022-10-01 | 0001101302-22-000050 | EDGAR | — |
| 2022-08-02 | 2022-07-02 | 0001101302-22-000042 | EDGAR | — |
| 2022-04-26 | 2022-04-02 | 0001101302-22-000024 | EDGAR | — |
| Filed | Accession | Source | Full Text |
|---|---|---|---|
| 2026-02-10 | 0001101302-26-000009 | EDGAR | 7K words |
| 2026-01-20 | 0001140361-26-001577 | EDGAR | — |
| 2026-01-14 | 0001101302-26-000003 | EDGAR | — |
| 2025-10-30 | 0001101302-25-000099 | EDGAR | — |
| 2025-10-15 | 0001101302-25-000095 | EDGAR | — |
| 2025-07-30 | 0001101302-25-000075 | EDGAR | — |
| 2025-07-16 | 0001101302-25-000068 | EDGAR | — |
| 2025-05-12 | 0001140361-25-018384 | EDGAR | — |
| 2025-05-07 | 0001101302-25-000056 | EDGAR | — |
| 2025-04-23 | 0001101302-25-000044 | EDGAR | — |
197 total filings indexed. 165 additional filings (S-1, DEF 14A, etc.) View all (JSON) · SEC EDGAR
| CIK | 0001101302 |
| Ticker | ENTG |
| Exchange | Nasdaq |
| SIC | 3089: Plastics Products, NEC |
| Incorporated | DE |
| Website | https://www.entegris.com |
| Listed | 2000-07-11 |
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